Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process - Concepedia

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Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process

66

Citations

36

References

2001

Year

In-D. Jeon, Chang J. Park, Doh-Y. Kim, Nong‐Moon Hwang

Journal of Crystal Growth

Materials ScienceMaterials EngineeringChemical EngineeringDiamond-like CarbonEngineeringMethane ConcentrationApplied PhysicsHydrogen

References

	Year	Citations

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