A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media

Abstract

Novel layered Surface Acoustic Wave (SAW) sensors, based on a ZnO/90/spl deg/ rotated ST-cut quartz crystal structure, were fabricated. They were employed as gravimetric sensor's for immunosensing applications and as SAW conductometric sensors for gas sensing applications. These sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas. Their mass detection limit in liquid media is as low as 100 pgr/cm/sup 2/.