High-Efficiency n-Type Si Solar Cells With Novel Inkjet-Printed Boron Emitters

Abstract

Formation of a well-passivated boron emitter for mass production of low-cost and high-efficiency n-type silicon solar cells is a major challenge in the photovoltaic industry. In this letter, we report on a novel and commercially viable method, inkjet printing, to create boron emitters. Phosphorus diffusion was used on the rear to form a back-surface held in conjunction with chemically grown oxide/silicon nitride (SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> ) stack on the front and back for surface passivation. Finally, front and back screen-printed contacts were formed through the dielectric stacks to fabricate large-area (239 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) n-type cells. This technology resulted in 19.0%-efficient p <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> -n-n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> cells with a V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">oc</sub> of 644 mV, a J <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">sc</sub> of 38.6 mA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , and a fill factor of 76.3%. This demonstrates for the hrst time the promise of boron-inkjet-printing technology for low-cost and high-performance n-type Si cells.