Smart CMOS Sensors with Integrated Magnetic Concentrators

Abstract

The combination of integrated magnetic concentrators (IMC) and modern CMOS Hall sensor technology extends the frontiers of magnetic sensing to new dimensions. Single-axis sensors are turned into multi-axis sensors while signal quality and resolution are enhanced by up to one order of magnitude. Integrated Magnetic Concentrators have a deep impact on sensor system design. On one hand, the material properties of the added magnetic layer and the tolerances arising from its deposition and structuring have to be taken into account. On the other hand multi-axis sensors offer the possibility to work with ratios of magnetic field components rather than with a single field component. This results in ageing and drift effects of sensor and magnet being virtually eliminated