Extreme ultraviolet optical properties of two SiO_2 based low-expansion materials

Abstract

Reflectances of two low-expansion materials, a recrystallized glass ceramic and a high silica glass, have been measured at five angles of incidence from 15° to 85° in the wavelength region from 80 to 310 Å and in some cases up to 1050 Å. Optical constants are derived and silicon core-level transitions analyzed.