A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch

Abstract

A low-voltage electrostatically actuated 2×2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror displacement (300 μm) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 μs), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.