Auger electron spectroscopy

Abstract

Abstract Auger spectroscopy has progressed from its initial use as a purely research tool to that of an analytical technique of general application wherever information about the composition of non-volatile surfaces is important. This, article describes the underlying physics of the Auger process and the instrumentation involved, discusses the reasons why Auger spectroscopy is valuable in the analysis of surface composition, gives examples of recent applications and developments, and finishes with some information on the present state of quantification of the technique.