Concepedia

Abstract

Mn-doped monoclinic β-(Ga<sub>1−x</sub>Mn<sub>x</sub>)<sub>2</sub>O<sub>3</sub> thin films were epitaxially grown on α-Al<sub>2</sub>O<sub>3</sub> (0001) substrates by alternately depositing Ga<sub>2</sub>O<sub>3</sub> and Mn layers using the laser molecular beam epitaxy technique.

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