Publication | Open Access
Chemical vapour deposition of antimony chalcogenides with positional and orientational control: precursor design and substrate selectivity
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Citations
37
References
2014
Year
Materials EngineeringMaterials ScienceChemical EngineeringSubstrate SelectivityPrecursor DesignChemical Vapour DepositionEngineeringTransition Metal ChalcogenidesSurface ScienceDifferent Film MorphologiesChemistryChemical VapourLayered MaterialChemical DepositionFunctional MaterialsChemical Vapor Deposition
A series of alkylchalcogenostibines have been synthesised and employed as precursors for the chemical vapour deposition of Sb<sub>2</sub>Te<sub>3</sub> and Sb<sub>2</sub>Se<sub>3</sub>. Variations in substrate and temperature give different film morphologies, and patterned arrays can be deposited using substrate selectivity.
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