Progress In Electromagnetics Research B · 2012 · 14 citations · 14 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrowave EngineeringMems CharacterizationMems DesignMems FabricationMems SwitchesRadio-frequency Integrated CircuitsRf MemsExperimental Results InterpretationOhmic Mems SwitchesOhmic Rf Mems SwitchesRf Mems FabricationRf Mems SwitchesSwitch Fabrication Processes
Abstract—This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results. 1.
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