Concepedia

Low turn-on voltage field emission triodes with selective growth of carbon nanotubes

K.J. Chen, Chia-Pin Lin, Kuei‐Hsien Chen, Li–Chyong Chen, H.C. Cheng

IEEE Electron Device Letters · 2001 · 25 citations · 6 references

DOI

Concepts

Abstract

A low turn-on voltage, field emission triode array has been fabricated using the selective deposition of carbon nanotubes (CNTs) in a microwave plasma chemical vapor deposition (MPCVD) system. The field emission triodes exhibited a low turn-on voltage of 13 V and a large emission current of 23 μA with the gate voltage at 60 V. Short-term stress reveals a 10% current fluctuation within 1800 sec. The excellent electric properties suggest that the array shows potential for application in field emission displays and vacuum microelectronics.

References

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