TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 17 citations · 6 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsSemiconductor DevicesElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignMems ResonatorsCantilever MechanicsChargesDepletion LayersElectrostatic Mems ActuatorsElectrostatic ResonatorsMicroresonators
The uncompensated donor or acceptor atoms present within the depletion layer of a diode can be employed in an electrostatic actuator which utilizes the force between them and their opposing charges on the other side of the junction. In this paper we describe the theory of such a depletion layer actuator and demonstrate its application for the simple case of a diode located on the top surface of a cantilever resonator. Good agreement between the experimental results and the theory is obtained. These devices offer a new route for the integration of MEMS resonators with CMOS processing.
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