A Compact Fiber-Tip Micro-Cavity Sensor for High-Pressure Measurement

Abstract

A novel fiber-tip micro-cavity pressure sensor was fabricated by use of a fusion splicer and a pressurizing gas chamber. The fabrication process is simple and efficient without the need for careful cleaving, chemical etching, and bonding. Micro-cavities with wall thickness of a few micrometers demonstrated a pressure sensitivity of ~ 315 pm/MPa . The sensors have compact size, good mechanic strength, and high temperature stability up to 600 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> C, and may be potentially used for pressure sensing in a high-temperature environment.