Fully integrated three dimensional sound intensity sensor

Abstract

For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.