Publication | Closed Access
Fabrication of silicon optical scanner for laser display
30
Citations
1
References
2000
Year
Unknown Venue
Electrical EngineeringNew Fabrication ProcessEngineeringFlexible ElectronicsMicrofabricationSilicon On InsulatorSilicon Optical ScannerLaser-based SensorInstrumentationLaser DisplayMicroelectronicsMicro-optical ComponentOptoelectronics3D PrintingElectrostatic Scanner
A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.
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