Electrochemical Performance of Iridium Oxide Thin Film for Supercapacitor Prepared by Radio Frequency Magnetron Sputtering Method

Abstract

IrO2 thin films were prepared by radio frequency (rf) sputteringtechnique, and the supercapacitive properties of the films werestudied by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) in 1 M LiNO3 electrolyte for the first time. The specific capacitance of the single IrO2 film electrode was calculated to be 293 F·g-1 at a scan rate of 5 mV·s-1for the sample prepared at room temperature.