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Publication | Open Access

Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides

DOIFull Paper Access

89

Citations

23

References

2011

Year

Montri Aiempanakit, Tomáš Kubart, Petter Larsson, Kostas Sarakinos, J. Jensen, Ulf Helmersson
Thin Solid Films

References

YearCitations

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