The design and characterization of a piezo-driven ultra-precision stepping positioner

Abstract

Ultra-precision positioning mechanisms with a high displacement resolution and long travelling range are becoming increasingly popular in industrial applications. In this design note, we discuss the design and characterization of a new piezo-driven ultra-precision stepping positioner composed of three piezoelectric actuators and a monolithic flexure hinge mechanism. The analytical models are presented, the formulae for static and dynamic characteristics are derived and the design process is described. It follows that the performance characterization is carried out. It is confirmed that this device is capable of performing a stepping motion with a high reproducibility, as well as a single movement with a displacement resolution of over 10 nm and a natural frequency of over 432 Hz.