Selective growth of InAs quantum dots by metalorganic chemical vapor deposition

Abstract

We report results of both strain-driven surface segregation of indium from InGaAs thin films as well as selective area epitaxy of InAs quantum dots using these films. InAs segregation from an underlying InGaAs film allows for preferential growth of quantum dots when additional InAs is deposited. By using standard lithography techniques, a two-step selective growth process for quantum dots is achieved. Furthermore, by utilizing self-assembled nanostructures as a template, selective growth of coalesced wires and dots with 100-nm feature sizes are realized.