Prototype micro-valve actuator

Abstract

An experimental demonstration of a millimeter-scale actuator using a sputter-deposited film of shape-memory alloy is presented. A membrane of the shape-memory film was prepared, securely held, and then displaced by pneumatic pressure. By applying a low-voltage electrical pulse to cause actuation, the membrane was able to work against the pneumatic load and exhibit two-state behavior.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>