Publication | Open Access

High-yield, in-situ fabrication and integration of horizontal carbon nanotube arrays at the wafer scale for robust ammonia sensors

Materials ScienceHorizontal Carbon NanotubeRobust Ammonia SensorsWafer Scale ProcessingEngineeringNanomaterialsNanotechnologyApplied PhysicsNano Electro Mechanical SystemSensor DesignNanosensorCarbon NanotubesSensor TechnologyWafer Scale