Publication | Closed Access
Direct microscale imprinting of Al at room temperature with Si inserts
25
Citations
16
References
2008
Year
Materials ScienceRoom TemperatureAluminium NitrideSi InsertsEngineeringElectron-beam LithographyBeam LithographyMicrofabricationSurface ScienceApplied PhysicsDirect Microscale ImprintingSemiconductor Device FabricationMicroelectronicsNanolithography MethodMicrostructure
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