Fabrication of Coated Conductors by Multiple-Stage CVD

Abstract

The multiple-stage Chemical Vapor Deposition technique was developed for making a long coated conductor with high deposition speed. In this paper, a multi-coating of YBCO layer using 6-stage CVD system was described. Substrates were PLD-CeO/sub 2//IBAD-Gd/sub 2/Zr/sub 2/O/sub 7//Hastelloy. Thickness of each layer was about 1.0 /spl mu/m, 1.0 /spl mu/m and 0.1 mm respectively. /spl Delta//spl phi/ of CeO/sub 2/ layer was about 9-10/spl deg/. Deposition rate of YBCO layer was 25 m/h and 5 m/h. Number of passing was 10 times and 2 times respectively. I/sub c/ of the tape which was prepared at a speed of 25 m/h /spl times/ 10 passes was 100 A/cm. Thickness of total YBCO layer was about 1 /spl mu/m and its J/sub c/ was 1 MA/cm/sup 2/. I/sub c/ of the tape which was prepared at a speed of 5 m/h /spl times/ 2 passes was 101 A/cm. Thickness of total YBCO layer was also 1 /spl mu/m and its J/sub c/ was 1 MA/cm/sup 2/.