A microfabricated transformer for high-frequency power or signal conversion

Abstract

A new microtransformer (1:1) for high frequency power or signal conversion has been designed, fabricated and characterized in this work. An innovative laterally laminated-core structure has been adopted and implemented by using new micromachining techniques. Using the fabricated microtransformer, a voltage gain of -4 dB has been achieved over the frequency range of 7-11 MHz. The coupling coefficient between the primary and secondary coils is higher than 0.9 up to 5 MHz. The transformer realized in this research functionally works as a basic transformer for power or signal conversion.