Concepedia

Deposition and characterization of sputtered ZnO films

Wenping Dang, Yongqing Fu, Jikui Luo, Andrew J. Flewitt, W. I. Milne

Superlattices and Microstructures · 2007 · 110 citations · 7 references

DOI

Concepts

References

7

Design and Analysis of Experiments

Gary Sullivan · Journal of Quality Technology · 1998 · 1.9K citations

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Postdeposition annealing of radio frequency magnetron sputtered ZnO films

M. K. Puchert, P. Y. Timbrell, Robert N. Lamb · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 278 citations

, , +17

Characterization and optimization of zinc oxide films by r.f. magnetron sputtering

Kalpathy B. Sundaram, Arshad Khan · Thin Solid Films · 1997 · 237 citations · Full text

, , +9

Preferred orientation and piezoelectricity in sputtered ZnO films

Z. M. Rittersma, G.J. Burger · Journal of Applied Physics · 1998 · 203 citations

, , +15

Postgrowth annealing of defects in ZnO studied by positron annihilation, x-ray diffraction, Rutherford backscattering, cathodoluminescence, and Hall measurements

Zhiyuan Chen, Seiji Yamamoto, M. Maekawa et al. · Journal of Applied Physics · 2003 · 162 citations

, , +17