Concepedia

Publication | Closed Access

High density plasma etching of amorphous CoZrNb films for thin film magnetic devices

DOI

11

Citations

8

References

2005

Year

Byul Shin, Ik Hyun Park, Jang Woo Lee, Tae Wan Kim, Chee Won Chung
Thin Solid Films

References

YearCitations

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