IEEE Transactions on Components Hybrids and Manufacturing Technology · 1978 · 23 citations · 6 references
Natural SciencesElectrical EngineeringPhysicsElectronic MaterialsSemiconductor DevicesThin FilmsLaser PhysicsThin Film Electrical PropertiesFilm Thickness ControlResistorsThickness ControlThin Film Thickness ControlTrim Effects
Some of the important parameters controlling the postlaser trim drift of 100, l-K, 10-K, and 100-K <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\Omega//\Box$^b$</tex> thick-film resistors are reported. The fired thickness of the resistor plays a major role in the control of post-trim drift. The resistors with fired thickness (tf) <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\leq</tex> 0.5 mil show small ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\DeltaR/R \leq</tex> 0.3 percent) and predictable drift, whereas those with t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</inf> > 0.5 mil produce large ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\DeltaR/R \geq</tex> 0.3 percent) and unpredictable drift. A mechanism for the post-trim drift is proposed. Results indicate that the percent trimming for precision resistors should be held within 25 to 30 percent range for minimum drift. The trim geometry such as L-cuts or two P-cuts from the same side of the resistor produces the least amount of drift. The protective overglaze coating on the resistors has a beneficial effect of reducing the drift, especially for the resistors with t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</inf> > 0.5 mil. The resistor size (L X W) does not significantly influence the drift as long as the t <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</inf> < 0.5 mil.
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