Attainable Resolution of Energy-Selecting Image Using High-Voltage Electron Microscope

Abstract

An imaging filter has been installed in a 1 MeV high-voltage electron microscope. Performances of the imaging filter system and some application results are presented. The energy resolution in the spectrum mode was 0.7 eV. The spatial resolution of inelastic scattering images was estimated theoretically by taking account of inelastic delocalization and the broadening due to objective lens aberrations. The energy-selecting imaging aimed at high-resolution observations has been examined for FeCl3 intercalated graphite compounds. The order of 1 nm resolution has been obtained experimentally, which is slightly worse than that expected by theoretical consideration.