Publication | Closed Access
Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering
32
Citations
12
References
2012
Year
Materials ScienceMaterial AnalysisEngineeringPhysicsMicrofabricationSurface ScienceApplied PhysicsMicroroughness ParametersDc MagnetronThin FilmsMicroelectronicsChemical Vapor DepositionThin Film ProcessingMicrostructure
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