IEEE Transactions on Pattern Analysis and Machine Intelligence · 1988 · 22 citations · 7 references
EngineeringComputer EngineeringElectrical EngineeringComputer VisionMicroelectronicsSemiconductor DevicesDefect DetectionEdge DetectionElectrical MeasurementIntegrated Circuit DesignIntegrated Circuit FabricationVery-large-scale Integration LayoutComputer Vision InspectionDefect InspectionLine DetectionScanning Electron Microscopy Surface AnalysisSemiconductor Wafer InspectionSurface ContoursSurface InspectionVisual Inspection Systems
A precision digital edge-line-detection method is presented that was developed for extracting edge contours of resist lines of submicrometer width as imaged by scanning electron microscopy, as a means of inspection in integrated circuit fabrication. The method is based on a modification of the Hough transform.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Discretization errors in the Hough transform
T. M. van Veen, F.C.A. Groen · Pattern Recognition · 1981 · 176 citations