16.1: Negative‐Bias Photodegradation Mechanism in InGaZnO TFT

Abstract

Abstract Recent studies have shown that IGZO are variously influenced by photoirradiation. In this study, by using measurement results of optical properties and calculation results, a relationship of defect levels in the IGZO films and the SiO 2 films to negative‐bias photodegradation was examined, and the mechanism of the degradation was revealed.