The surface analysis of insulators by SIMS: Charge neutralization and stabilization of the surface potential

Abstract

Abstract As part of an ongoing programme of reference work for surface analysis at the NPL, the problem of surface charging when analysing insulators by static SIMS is discussed. Meaningful analysis requires stabilization of the surface potential to a defined reference point, here taken as the potential that would exist if the insulator was a conductor. In SIMS spectra it is shown that both the absolute and relative intensities of peaks depend on the surface potential. It is also shown that, only by the correct design of an electron flood source, can the surface be stabilized to a given constant reference potential. The relevant design principles are illustrated by measurements on isolated targets which define the characteristics of the flood source. Stabilization is effected to within the ±0.5 eV required for static SIMS.