Silicon Microelectrodes with Flexible Integrated Cables for Neural Implant Applications

Abstract

This paper describes two different cable structures that can be integrated with silicon microprobes and fabricated using etch-stops and a wet release at wafer level. One is a serpentine silicon ribbon cable and the other is a parylene cable. They provide highly flexible biocompatible interconnects between the implanted microelectrodes and implanted or external microsystems. Silicon microelectrodes integrated with these cable structures demonstrate consistent and reliable neural recording both acutely and chronically.