AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere - Concepedia

Concepedia

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AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere

25

Citations

15

References

1997

Year

P. Verardi, M. Dinescu, C. Gerardi, L. Mirenghi, V. Sandu

Applied Surface Science

Materials ScienceNitrogen Reactive AtmosphereAluminium NitrideEngineeringSurface ScienceApplied PhysicsLaser ApplicationsLaser AblationLaser Processing TechnologyLaser-assisted DepositionPulsed Laser DepositionAl Target

References

	Year	Citations

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