Publication | Closed Access
Nanoindentation-induced phase transformation in (110)-oriented Si single-crystals
72
Citations
30
References
2009
Year
Materials ScienceEngineeringMicrofabricationNanotechnologyApplied PhysicsSemiconductor Device FabricationNanoindentation-induced Phase TransformationSilicon On Insulator
| Year | Citations | |
|---|---|---|
Page 1
Page 1