Electrical Properties of Tin Oxide Ultrafine Particle Films

Abstract

The film structures and gas sensing properties of tin oxide ultrafine particle films deposited under oxygen pressures between 0.05 and 5 Torr have been studied. The ultrafine particle film having porous columnar structure is found to have high sensitivities in detecting humidity or combustible gases when operated at elevated temperatures. The films can be made selectively sensitive to these gases by choosing the film depositing conditions and the operating temperature.