Concepedia

Publication | Closed Access

A novel thick photoresist for microsystem technology

DOI

12

Citations

2

References

2003

Year

Ph. Niedermann, H. Berthou, S. Zwickl, Urs P. Schönholzer, K. U. Meier, Ch. Gantner, D. Kapp-Schwoerer
Microelectronic Engineering

References

YearCitations

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