UV Emission of Excimer XeCl* Excited in Dielectric Barrier Discharge by using Pulse Power Supply

Abstract

A dielectric barrier discharge experimental setup, which is convenient to vary the gas parameters of the mixture of xenon and chlorine, has been established and used to generate UV emission (308 nm). The influences of the partial pressure of chlorine and the total gas pressure on the UV emission under different electric parameters of pulse power supply have been studied preliminarily.