A plane-grating monochromator for radiometric calibration

Abstract

A new plane-grating monochromator and calibration chamber were constructed for the radiometric calibration of plasma diagnostic devices. The monochromator is designed to cover a wavelength range of 1.8–238 nm with moderate resolving power of 500±200 in λ/Δλ. To check the performance of the monochromator, spectral distribution and resolution were measured by experiments on photoemission from solids and photoionization of rare gases. The characterization of multilayer reflectors by the use of this beamline is demonstrated.