Propagation loss characteristics of long silica-based optical waveguides on 5 inch Si wafers

Abstract

The propagation loss characteristics of silica-based optical waveguides with various bending curvatures fabricated on 5 inch Si wafers are investigated. Low loss waveguides more than lm long with a Δ of 0.75% are successfully fabricated and the loss is found to be independent of the curvature radius over 5mm. A minimum loss of 3.5dB/m at ∼1.55 μm is obtained in a waveguide 1.6 m long.