Publication | Closed Access
Mechanical and electrical properties of fcc TiO1+x thin films prepared by r.f. reactive sputtering
59
Citations
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References
1998
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringOxide ElectronicsApplied PhysicsHigh-performance MaterialReactive SputteringThin FilmsElectrical PropertiesThin Film Processing
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