IEEE Journal of Selected Topics in Quantum Electronics · 2002 · 46 citations · 13 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsMicrofabricationSemiconductor DevicesMems DesignMems MaterialsMems SwitchesMicrofabrication MaterialsMicrofabrication ProcessesCantilever Beam BendingCantilever Beam DeflectionCrosstalkIntegrated Optical WaveguidesIntegrated WaveguidesLow-power ActuationLow-voltage ActuationMicroswitches
Planar micromechanical waveguide switches based on lateral deflection of a cantilever beam are presented. Two material systems have been used: a GaAs-AlGaAs structure with integrated waveguides and a silicon-on-insulator (SOI), with postprocessed polymeric waveguides. The switches are characterized by low actuation voltage (3-20 V), short switching times (32-200 /spl mu/s), and low crosstalk (< -30 dB).
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