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Separation of laterally overgrown GaN template by using selective electrochemical etching

Overgrown Gan TemplateWide-bandgap SemiconductorElectrical EngineeringEngineeringSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DevicePlasma EtchingCategoryiii-v SemiconductorSelective Electrochemical Etching