Publication | Closed Access
Formation of luminescent (NH4)2SiF6 phase from vapour etching-based porous silicon
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Citations
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References
2003
Year
Materials EngineeringChemical EngineeringEngineeringNanotechnologySurface ScienceApplied PhysicsSemiconductor Device FabricationChemistrySilicon On InsulatorLuminescence PropertyPlasma EtchingOptoelectronicsChemical Vapor Deposition
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