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Film-thickness considerations in microcantilever-beam test in measuring mechanical properties of metal thin film

Materials ScienceEngineeringMicromechanicsMechanical PropertiesMicrofabricationMechanical EngineeringApplied PhysicsFilm-thickness ConsiderationsMicrostructure-strength RelationshipThin FilmsMetal Thin FilmMechanics Of MaterialsMicrostructureThin Film Processing