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Ultrasonic micromachining on Al thin film using atomic force microscopy combined quartz crystal resonator

Materials ScienceAcoustic MicroscopyEngineeringMicromachinesMicrofabricationApplied PhysicsUltrasonic MicromachiningAcoustic TweezerUltrasoundAl Thin FilmMicro-electromechanical SystemQuartz Crystal ResonatorMicrostructureMicromachined Ultrasonic Transducer