A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining - Concepedia

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A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining

113

Citations

7

References

2007

Year

Hidenori Shinno, Hiroto Yoshioka, K. Taniguchi

Robot KinematicsEngineeringAerospace EngineeringMaterial MachiningMechanical EngineeringMechanical SystemsMachine ToolPropulsionRobotics

References

	Year	Citations

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