Aluminum-silicon ohmic contact on “shallow” junctions - Concepedia

Concepedia

Publication | Closed Access

Aluminum-silicon ohmic contact on “shallow” junctions

44

Citations

13

References

1980

Year

M. Finetti, P. Ostoja, S. Solmi, G. Soncini

Solid-State Electronics

Aluminum-silicon Ohmic ContactApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorSemiconductor Device

References

	Year	Citations

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