Microfluidic components in LIGA technique

Abstract

The transport of small amounts of fluids and gases must be controlled with a view to automated drug dosage, chemical analysis with microsensors, and hydraulic as well as pneumatic microactuators. Components for microfluidic systems have been developed at Karlsruhe Nuclear Research Center which are manufactured by the LIGA technique. Micropumps have been fabricated by combining thermoplastic molding with membrane techniques. It is envisaged to integrate these micropumps into a module for handling gases and liquids. The module can then be coupled with different sensor modules to form microsystems, e.g. for the detection of toxic chemicals in the environment or for bedside analysis in hospitals. Microvalve systems and fluidic beam amplifiers have been developed for hydraulic and pneumatic actuators. These devices are capable of controlling a liquid or gas stream and may be used to steer e.g. instruments in a catheter tip for minimally invasive surgery.