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Reaction mechanisms for the photon-enhanced etching of semiconductors: An investigation of the UV-stimulated interaction of chlorine with Si(100)

SemiconductorsPhotonicsChemical EngineeringPhoton-enhanced EtchingEngineeringPhotonic DeviceUv-stimulated InteractionApplied PhysicsSemiconductor Device FabricationPhotonic Integrated CircuitChemistryReaction MechanismsSilicon On InsulatorPlasma EtchingOptoelectronics